Beilstein J. Nanotechnol.2018,9, 2049–2056, doi:10.3762/bjnano.9.194
) radiation; focused ion beam (FIB); Fresnelzoneplate; ion beam lithography (IBL); nanopatterning; soft X-rays; Introduction
Requirements for focusing elements that work at extreme ultraviolet (EUV) and soft X-ray (SXR) energies are very different from those of the more familiar ultraviolet, visible or
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Figure 1:
a) For the fabrication of an IBL FZP first, a ca. 100 nm gold layer is deposited on a commercial Si3...
Beilstein J. Nanotechnol.2014,5, 1175–1185, doi:10.3762/bjnano.5.129
, Poland.
STXM experiments were performed at the PolLux beamline at the Swiss Light Source (SLS), Paul Scherrer Institut, Villigen (CH) [28]. The standard STXM setup uses high brilliance synchrotron radiation light that is focused on the sample by a Fresnelzoneplate. The sample is raster-scanned with
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Figure 1:
Fabrication and secondary/tertiary growth of nanostructures. The deposits can be fabricated by elec...